YieldAssist and Its Successful Industrial Applications
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Format: PDF Document Yield Improvement, Verified Flow, Accuracy, Layout Aware and Volume Diagnosis Feature-related defects are becoming more prevalent than particle-driven defects in nanometer designs. The process and design variances require checks for the design-for-manufacturing (DFM) issues in order to achieve a high yield. Scan diagnostics targeted for the nanometer designs can provide quick, accurate and reliable failure information from the production environment. The sorted, fault classified and physically linked scan diagnosis results can, in turn, provide the guides for DFM checks. High volume diagnosis provides data to yield management system for statistical analysis. YieldAssist, Mentor's scan diagnosis solution has been adopted by many customers to meet these goals. This paper explains the technology behind it, discusses its applications and shows the results. |