Calibre RET (OPC and PSM)

  • Ensure accurate simulation and correction
  • Minimizes data expansion with an advanced hierarchical database engine
  • Fully integrated physical verification and RET technologies make it easy to upgrade an established flow from layout-to-silicon with next-generation technology
  • Ensures that just the right amount of RET is applied for each run

Benefits

  • 'Mask-friendly' OPC, PSM, and fracture format output minimizes mask costs and lowers overall write times
  • Complete PSM solution enables layout of fast, small gate

Complementary products:

  • Calibre OPCsbar – Scattering bars
  • Calibre TDopc – Table-driven OPC
  • Calibre PSMgate – Phase shift mask assignment for gates
  • Calibre WORKbench – Environment for creating accurate process models and tested production-ready tool setup files
  • Calibre LITHOview – subset of Calibre WORKbench
  • Calibre Printimage – Simulated silicon print image

Mentor Technology Viewpoint: RET/OPC

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