Equation-Based DRC: A Novel Approach to Resolving Complex Nanometer Design Issues

ABSTRACT

Traditional physical verification uses single-dimensional design rule checks (DRC) to identify sensitive layout features likely to fail during manufacturing. Checks that require coding large tables of measurement thresholds are extremely difficult to implement using traditional DRC approaches. A new technique, known as Equation-Based DRC (eqDRC), extends traditional DRC to define grouped multi-dimensional feature measurements using flexible mathematical expressions, providing a customizable physical modeling tool and enabling the analysis of complex interactions that could not previously be verified. This paper will examine the implementation and demonstrate the benefits of eqDRC through a variety of examples comparing traditional DRC with eqDRC approaches.