Process Technology Disruptions and the Evolution of Diagnosis Driven Yield Analysis
Recent technology nodes have each brought about new process challenges that introduced manufacturing defects which required new yield learning methods. This presentation takes a look back at the recent process technology history to understand how diagnosis-driven yield analysis was used successfully to drive yield improvement and review some of the surprise lessons learned.
This presentation will take a look to the upcoming FinFET process technology and extrapolate how diagnosis driven yield analysis will need to continue to evolve to address the expected yield challenges of this significant change to fabrication technology.
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