Defects and Defect Detection Industry Trends
White Paper
ABSTRACT
This white paper describes the known common manufacturing defects and methods for detecting defects.
At design nodes smaller than 90 nm, manufacturing test challenges grow exponentially as compared to larger design nodes. At larger design nodes, manufacturing defects were typically a bridge or open that could be detected using a stuck-at tests. At smaller design nodes defects that effect at-speed performance are becoming more common and slow speed testing will not detect them.
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