Calibre RET/OPC Basics

Course Highlights

The lecture modules will guide you through the various concepts underlying state-of-the-art RET/OPC techniques and specific aspects of the Calibre toolset. Hands-on lab exercises will reinforce lecture topics and provide you with rule writing experience under the guidance of our industry expert instructors.

You will learn how to

• Use Calibre nmBIAS for rule-based retargeting
• Use Calibre nmSRAF^TM to insert sub-resolution assist features (SRAFs) into a design
• Use Calibre PIXbar to automatically generate SRAFs
• Modify SRAF generation using various options
• Find and correct SRAF conflicts with Mask Rule Constraints (MRCs)
• Create Calibre nmOPC^TM setup files
• Specify various nmOPC options and simulation settings
• Control fragmentation options
• Manage OPC correction and convergence
• Write simple nmOPC TCL scripts
• Apply Calibre Process Window OPC (PWOPC) to meet the challenges of the real world lithography process
• Use Calibre SRAF Print Avoidance (SPA) to detect and prevent sub-resolution assist features (SRAFs) from printing
• Integrate OPCverify^TM into the post-tapeout flow
• Write and execute simple OPCverify rule decks
• Generate a basic OPCverify setup file for layer verification
• Perform process window verification in both production and recipe development flows
• Use limiting code in OPCverify to reduce error output
• Analyze OPCverify tabular property data with the Calibre RVE GUI

Hands-on labs

• Running Calibre nmBIAS in rule mode and table mode
• Using LFT for nmSRAF template setup
• Generating SRAFs with Calibre PIXbar
• Using RectCorner and RectEdge with SRAF templates
• Using various SRAF options
• Modifying the minfeaturespace value specified in the setup file in order to get the rectCorner template to resolve
• Reviewing a Calibre nmOPC setup file
• Exploring the impact of corner_control values on fragment sizes
• Examining the impact of scale factor on EPE
• Writing an nmOPC script
• Experimenting with tolerance settings
• Changing model thresholds to determine the impact on SRAF printing errors
• Checking line end EPE
• Finding pinching and bridging areas
• Executing contact coverage and alignment checks
• Generating PV bands
• Examining the portions of the rule file that control MEEF, NILS, and DOF checks
• Working with the error centric flow