Calibre Dense RET: CM1
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Duration: 2 Days
Price: $1,600 USD
Course Part Number: 223525
Contact us for details about training at your site Course Overview
In order to meet the increasingly complex computational demands of 65 nm and below technology, a new family of Calibre RET tools has been developed. These tools are based upon grid-based, or “dense” simulation, as opposed to so called “sparse” simulations used in Calibre OPCPro and ORC. This class will teach you to effectively work with the dense CM1 model, along with CM1 Center, one of the the grid-based RET tools, empowering you to optimize and verify your designs for maximum manufacturability. The lecture modules will guide you through the various concepts underlying state-of-the-art resolution enhancement techniques and specific aspects of the Calibre RET toolset. Hands-on lab exercises will reinforce lecture topics and provide you with extensive tool usage experience under the guidance of our industry expert instructors. This advanced two-day class will teach you how to calibrate CM1 process models which are used for grid based simulations.
Detailed lab exercises help reinforce what is discussed during the lectures and provide you with extensive tool usage experience under the guidance of our industry expert instructors. Please note: This class is not for beginners. The materials assume a substantial understanding of Calibre OPC.
You will learn
- The difference between sparse and dense (grid) based simulations
- The difference between VT5 and CM1 process models.
- How to calibrate CM1 process models.
- How to calibrate Variable Etch Bias etch models.
- How to use ContourCal for SEM image based process model calibration
Hands-On Labs
Throughout this course, extensive hands-on lab exercises provide you with practical experience in using grid-based Calibre RET tools under the guidance of our expert instructors. Hands-on lab topics include:
- CM1 Model Calibration
- VEB Model Calibration
- Using the CM1 Center GUI
- Tapeout specialists, integration specialists, lithographers, and process engineers who will use Calibre RET tools for 65 nm and below technologies.
- CAD Engineers and Managers who will be responsible for integration of the Calibre toolset in their design flow
Prerequisites
- Knowledge of IC Layout concepts
- Familiarity with mask resolution enhancement technology issues and techniques
- Familiarity with UNIX
- Knowledge of layout verification concepts and tools (helpful but not required)
Key Topics
- CM1 modeling basics
- CM1 model calibration
- VEB model calibration
- CM1 Center