Calibre Dense RET: nmOPC

Duration:  2 Days
Price:  $1,600 USD
Course Part Number: 223526

Course Overview

In order to meet the increasingly complex computational demands of 65 nm and below technology, a new family of Calibre RET tools has been developed.  These tools are based upon grid-based, or “dense” simulation, as opposed to so called “sparse” simulations used in Calibre OPCPro and ORC.  This class will teach you to effectively use nmOPC, one of the grid-based RET tools, empowering you to optimize and verify your designs for maximum manufacturability.  The lecture modules will guide you through the various concepts underlying state-of-the-art resolution enhancement techniques and specific aspects of the Calibre RET toolset. Hands-on lab exercises will reinforce lecture topics and provide you with extensive tool usage experience under the guidance of our industry expert instructors.

This advanced two-day class will teach you how to use nmOPC, the grid-based layout correction tool.

Detailed lab exercises help reinforce what is discussed during the lectures and provide you with extensive tool usage experience under the guidance of our industry expert instructors. Please note: This class is not for beginners. The materials assume a substantial understanding of Calibre OPC.

You will learn

• The difference between sparse and dense OPC tools
• How to create and optimize a basic nmOPC recipe
• How to use advanced nmOPC features such as mask and image constraints, Process Window correction, retarget and smoothed layers.
• How to use advanced fragmentation features of nmOPC.
• How to use the powerful scripting capability of nmOPC to completely control OPC, get faster runtimes, and do thorough analysis of OPC recipes.
• How to use nmOPC tools in Calibre Workbench

Hands-On Labs

Throughout this course, extensive hands-on lab exercises provide you with practical experience in using grid-based Calibre RET tools under the guidance of our expert instructors. Hands-on lab topics include:  

• Use of LITHO DENSEOPC
• Use of fragmentation controls, MRC, and PW constraints in nmOPC
• Use of Preclean, OPC Repair, and target smoothing controls in nmOPC
• Use of nmOPC scripting

Audience

• Tapeout specialists, integration specialists, lithographers, and process engineers who will use Calibre RET tools for 65 nm and below technologies.
• CAD Engineers and Managers who will be responsible for integration of the Calibre toolset in their design flow

Prerequisites

• Familiarity with mask resolution enhancement technology issues and techniques
• Familiarity with UNIX
• Knowledge of layout verification concepts and tools (helpful but not required)

Key Topics

• Automatic fragmentation
• EPE calculation
• Process window OPC
• Writing nmOPC setup files
• Custom fragmentation
• Introduction to nmOPC  scripting
• Using the Workbench GUI.