Calibre RET

Duration: 2 Days
Pricing: 1,000 GBP  (1,480 EUR)
Course Part Number:  211721

Description

Calibre RET (Resolution Enhancement Techniques) ensure feature sizes below the wavelength of light will print accurately, every time. Learn to use these technologies (Rule based or Model based OPC, PSM Modeling, Scattering Bar, etc.) to decrease production costs, reduce compute times and maximize correction thoroughness by attending the Calibre RET Introduction course. 

The lecture modules will guide you through the various concepts underlying state-of-the-art resolution enhancement techniques. Hands-on lab exercises will reinforce lecture topics and provide you with extensive tool usage experience under the guidance of our industry expert instructors.

You will learn how to

• Write and edit a SVRF Calibre rule
• Debug Calibre rules decks using Calibre WORKBENCHTM
• Use Calibre WORKBENCH(TM) for layout viewing, editing, and simulation
• Create a simple Calibre RET setup file
• Use Calibre for Rule Based Optical and Process Correction (OPC)
• Use Calibre to apply Scatter Bars to a layout 
  

Hands-On Labs

• Calibre WORKBENCH(TM)
• Operations Calibre DRC basics
• Rule Based OPC
• OPCSbar

Audience

• Tapeout specialists, integration specialists, lithographers, and process engineers who will use Calibre RET tools.
• CAD Engineers and Managers who will be responsible for integration of the Calibre toolset in their design flow

Prerequisites

• Knowledge of IC Layout concepts
• Familiarity with UNIX
• Knowledge of layout verification concepts and tools

Key Topics

• Calibre SVRF Primer Basic
• Calibre rule deck writing
• Rule Based OPC with Calibre
• Debugging Calibre rules decks using Calibre
• Workbench Calibre RET Tools
• Model Creation
• Creation of a Calibre RET technology setup file
• Simulating OPC corrections
• Calibre Workbench
• OPCSbar